Study of the Wet Re-Oxidation Annealing of SiO2/4H-SiC...

Materials Science Forum 2003 Vol. 433-436

Study of the Wet Re-Oxidation Annealing of SiO2/4H-SiC (0001) Interface Properties by AR-XPS Measurements

Ekoué, A., Renault, O., Billon, Thierry, Di Cioccio, Lea, Guillot, Gérard
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Volume:
433-436
Year:
2003
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.433-436.555
File:
PDF, 187 KB
english, 2003
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