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Effect of Spacer Scaling on PMOS Transistors
Lau, Wai Shing, Eng, Chee Wee, Vigar, David, Chan, Lap, Siah, Soh YunVolume:
913
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0913-D03-04
Date:
January, 2006
File:
PDF, 62 KB
english, 2006