Deposition and Characterization of Metal Containing...

Materials Science Forum 1998 Vol. 287-288

Deposition and Characterization of Metal Containing Amorphous Hydrocarbon Films (Me-C:H) Prepared by DC Magnetron Sputtering

Specht, C., Schroeder, J., Wittorf, R., Grischke, M., Bewilogua, K.
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Volume:
287-288
Year:
1998
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.287-288.383
File:
PDF, 291 KB
english, 1998
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