Effect of Structure on the Performance of Electrostatic...

Advanced Materials Research 2011 / 8 Vol. 317-319

Effect of Structure on the Performance of Electrostatic MEMS Actuator

Hu, Fang Rong, Chen, Man E, Xiao, Jing, Yu, Wei, Niu, Jun Hao, Nie, Kun
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Volume:
317-319
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.317-319.1627
Date:
August, 2011
File:
PDF, 2.58 MB
english, 2011
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