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[ECS 23rd Symposium on Microelectronics Technology and Devices - Gramado, Brazil (September 1 - September 4, 2008)] ECS Transactions - Simulation of Anisotropic Etching of Silicon using a Cellular Automata Model
De Oliveira Jr., Jose P., Carreño, Marcelo N.Volume:
14
Year:
2008
Language:
english
DOI:
10.1149/1.2956015
File:
PDF, 4.78 MB
english, 2008