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Fin Sidewall Microroughness Measurement by AFM
Gondran, Carolyn F. H., Morales, Emily, Guerry, Angela, Xiong, Weize, Cleavelin, C. Rinn, Wise, Rick, Balasubramanian, Sriram, King, Tsu-JaeVolume:
811
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-811-E1.13
Date:
January, 2004
File:
PDF, 210 KB
english, 2004