Texture and Lattice Strain Determination of Molybdenum Thin...

Texture and Lattice Strain Determination of Molybdenum Thin Films Deposited by D.C. Magnetron Sputtering

Gergaud, Patrice, Bosland, P., Bacmann, J.J., Lebrun, Jean Lu
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Volume:
79-82
Year:
1991
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.79-82.653
File:
PDF, 388 KB
1991
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