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Texture and Lattice Strain Determination of Molybdenum Thin Films Deposited by D.C. Magnetron Sputtering
Gergaud, Patrice, Bosland, P., Bacmann, J.J., Lebrun, Jean LuVolume:
79-82
Year:
1991
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.79-82.653
File:
PDF, 388 KB
1991