Fabrication of Micro-Fluid-Channel Structures by Focused Ion Beam Techniques
Yanagisawa, Junichi, Kobayashi, Hiroaki, Koreyama, Kakunen, Akasaka, YoichiVolume:
1181
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1181-DD03-01
Date:
January, 2009
File:
PDF, 3.94 MB
english, 2009