Selective Polishing of Polysilicon during Fabrication of Microelectromechanical Systems Devices
Dandu Veera, P. R., Natarajan, A., Hegde, S., Babu, S. V.Volume:
156
Year:
2009
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3111811
File:
PDF, 971 KB
english, 2009