Effects of Boron Doping on the Annealing Characteristics of...

Materials Science Forum 1989 Vol. 38-41

Effects of Boron Doping on the Annealing Characteristics of Cz-Silicon

Puff, Werner, Mascher, Peter, Kerr, D., Dannefaer, S.
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Volume:
38-41
Year:
1989
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.38-41.225
File:
PDF, 285 KB
1989
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