Substrate spacing and thin-film yield in chemical bath...

Semiconductor Science and Technology 2000 / 11 Vol. 15; Iss. 11

Substrate spacing and thin-film yield in chemical bath deposition of semiconductor thin films

Reádigos, A Arias-Carbajal, García, V M, Gomezdaza, O, Campos, J, Nair, M T S, Nair, P K
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Volume:
15
Language:
english
Journal:
Semiconductor Science and Technology
DOI:
10.1088/0268-1242/15/11/302
Date:
November, 2000
File:
PDF, 217 KB
english, 2000
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