Effects of Ethylene∕Nitrogen Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films
Lai, Liang-Hsun, Huang, Ke-Jie, Shiue, Sham-Tsong, Chang, Jing-Tang, He, Ju-LiangVolume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.083206jes
File:
PDF, 347 KB
english, 2012