Effects of Ethylene∕Nitrogen Mixtures on Thermal Chemical...

Effects of Ethylene∕Nitrogen Mixtures on Thermal Chemical Vapor Deposition Rates and Microstructures of Carbon Films

Lai, Liang-Hsun, Huang, Ke-Jie, Shiue, Sham-Tsong, Chang, Jing-Tang, He, Ju-Liang
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Volume:
159
Year:
2012
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/2.083206jes
File:
PDF, 347 KB
english, 2012
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