Thermal and mechanical analysis of micromachined gas...

Journal of Micromechanics and Microengineering 2003 / 09 Vol. 13; Iss. 5

Thermal and mechanical analysis of micromachined gas sensors

Puigcorb, J, Vogel, D, Michel, B, Vil, A, Gr cia, I, Can, C, Morante, J R
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Volume:
13
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/13/5/304
Date:
September, 2003
File:
PDF, 799 KB
english, 2003
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