Epitaxial Growth on 2° Off-axis 4H SiC Substrates with Addition of HCl
Zhang, Jie, Sunkari, Swapna, Mazzola, Janice, Tyrrell, Becky, Stewart, Gray, Stahlbush, R, Caldwell, J, Klein, P, Mazzola, Michael, Casady, JannaVolume:
1069
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1069-D07-10
Date:
January, 2008
File:
PDF, 6.06 MB
english, 2008