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Fabrication and characterisation of suspended narrow silicon nanowire channels for low-power nano-electro-mechanical (NEM) switch applications
Boodhoo, L., Crudgington, L., Chong, H.M.H., Tsuchiya, Y., Moktadir, Z., Hasegawa, T., Mizuta, H.Volume:
145
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2015.02.047
Date:
September, 2015
File:
PDF, 1.28 MB
english, 2015