Improvement of Thermal Stability of Nickel Silicide Using...

Solid State Phenomena 2007 Vol. 121-123

Improvement of Thermal Stability of Nickel Silicide Using Multi-Capping Structure

Kim, Yong Jin, Choi, Chel Jong, Oh, Soon Young, Yun, Jang Gn, Lee, Won Jae, Ji, Hee Hwan, Wang, Jin Suk, Lee, Hi Deok
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Volume:
121-123
Year:
2007
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.121-123.1261
File:
PDF, 749 KB
english, 2007
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