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Defect Characterization of Homo-Epitaxially Grown 6H-SiC on (0001) Silicon and (000-1) Carbon Faces
Stoemenos, J., Di Cioccio, Lea, Papaioannou, V., David, D., Pudda, C.Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.409
File:
PDF, 692 KB
1998