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Modeling and experimental verification of thermally induced residual stress in RF-MEMS
Somà, Aurelio, Saleem, Muhammad MubasherVolume:
25
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/25/5/055007
Date:
May, 2015
File:
PDF, 3.14 MB
english, 2015