Ultrasmooth surface polishing based on the hydrodynamic effect
Peng, Wenqiang, Guan, Chaoliang, Li, ShengyiVolume:
52
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.52.006411
Date:
September, 2013
File:
PDF, 753 KB
english, 2013