Ultrasmooth surface polishing based on the hydrodynamic...

Ultrasmooth surface polishing based on the hydrodynamic effect

Peng, Wenqiang, Guan, Chaoliang, Li, Shengyi
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Volume:
52
Language:
english
Journal:
Applied Optics
DOI:
10.1364/ao.52.006411
Date:
September, 2013
File:
PDF, 753 KB
english, 2013
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