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[IEEE 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - Estoril, Portugal (2015.1.18-2015.1.22)] 2015 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS) - A dynamically mode-matched piezoelectrically transduced high-frequency flexural disk gyroscope
Hodjat-Shamami, Mojtaba, Norouzpour-Shirazi, Arashk, Tabrizian, Roozbeh, Ayazi, FarrokhYear:
2015
Language:
english
DOI:
10.1109/memsys.2015.7051077
File:
PDF, 1.07 MB
english, 2015