Surface Phase Diagram of 4H-SiC {0001} Step-Terrace Structures during Si-Vapor Etching in a TaC Crucible
Ushio, Shoji, Karaki, Tatsuya, Hagiwara, Kenta, Ohtani, Noboru, Kaneko, TadaakiVolume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.573
Date:
May, 2012
File:
PDF, 505 KB
english, 2012