Influence of the incident flux angles on the structures and...

Journal of Physics D Applied Physics 2015 / 05 Vol. 48; Iss. 17

Influence of the incident flux angles on the structures and properties of magnetron sputtered MoS 2 films

Qiao, Li, Wang, Peng, Chai, Liqiang, Zhang, Xiaolong, Liu, Weimin
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Volume:
48
Language:
english
Journal:
Journal of Physics D: Applied Physics
DOI:
10.1088/0022-3727/48/17/175304
Date:
May, 2015
File:
PDF, 1.89 MB
english, 2015
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