Nitrogen Implantation and Diffusion in Crystalline...

ECS Journal of Solid State Science and Technology 2012 / 10 Vol. 1; Iss. 6

Nitrogen Implantation and Diffusion in Crystalline Germanium: Implantation Energy, Temperature and Ge Surface Protection Dependence

Skarlatos, D., Bersani, M., Barozzi, M., Giubertoni, D., Vouroutzis, N. Z., Ioannou-Sougleridis, V.
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Volume:
1
Language:
english
Journal:
ECS Journal of Solid State Science and Technology
DOI:
10.1149/2.003301jss
Date:
October, 2012
File:
PDF, 787 KB
english, 2012
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