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Vapour-Liquid-Solid Induced Localised Growth of Heavily Al Doped 4H-SiC on Patterned Substrate
Jacquier, Christophe, Ferro, Gabriel, Godignon, Phillippe, Montserrat, Josep, Dezellus, Olivier, Monteil, YvesVolume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.241
File:
PDF, 919 KB
english, 2004