Study of Silicon Nanoparticles Formation in Silicon Nitride

Solid State Phenomena 2012 / 3 Vol. 186

Study of Silicon Nanoparticles Formation in Silicon Nitride

Ratajczak, Jacek, Hejduk, Krzysztof, Lipiński, Marek, Piotrowski, Tadeusz, Płuska, Mariusz, Łaszcz, Adam, Czerwiński, Andrzej
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Volume:
186
Language:
english
Journal:
Solid State Phenomena
DOI:
10.4028/www.scientific.net/SSP.186.66
Date:
March, 2012
File:
PDF, 722 KB
english, 2012
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