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Microfabricated Retarding Potential Analyzers With Enforced Aperture Alignment for Improved Ion Energy Measurements in Plasmas
Heubel, Eric Vincent, Velasquez-Garcia, Luis FernandoYear:
2015
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/JMEMS.2015.2399373
File:
PDF, 7.66 MB
english, 2015