Pore Sealing of a Porous Dielectric by Using a Thin PECVD a-SiC:H Conformal Liner
Jousseaume, V., Fayolle, M., Guedj, C., Haumesser, P. H., Huguet, C., Pierre, F., Pantel, R., Feldis, H., Passemard, G.Volume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2018607
File:
PDF, 347 KB
english, 2005