Low Coherence Interferometric Metrology for Ultra-thin MEMs...

MRS Proceedings 2004 / 1 Vol. 820

Low Coherence Interferometric Metrology for Ultra-thin MEMs Structures

Walecki, Wojciech, Wei, Frank, Van, Phuc, Lai, Kevin, Lee, Tim, Souchkov, Vitali, Lau, SH, Koo, Ann
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Volume:
820
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-820-O8.8
Date:
January, 2004
File:
PDF, 99 KB
english, 2004
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