The Detection of Different Physical Properties of...

Advanced Materials Research 2011 / 2 Vol. 194-196

The Detection of Different Physical Properties of Laser-Damaged HfO2 Film on SiO2 Substrate by Scanning Probe Acoustic Microscope

Yao, Wen Gang, Cheng, Qian
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Volume:
194-196
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.194-196.2448
Date:
February, 2011
File:
PDF, 686 KB
english, 2011
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