Length Effect on Formation of Metallic Patterns by Nanoimprinting Process – Molecular Dynamics Simulation
Cheng, Ming Chieh, Hsueh, Yun Liang, Chen, Hsung Yu, Sung, Cheng KuoVolume:
505-507
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.505-507.133
File:
PDF, 2.12 MB
english, 2006