Study of Initial Stage of SiC Growth on Si(100) Surface by...

Materials Science Forum 1998 Vol. 264-268

Study of Initial Stage of SiC Growth on Si(100) Surface by XPS, RHEED and SEM

Takaoka, T., Saito, Haruo, Igari, Y., Kusunoki, I.
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Volume:
264-268
Year:
1998
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.264-268.203
File:
PDF, 333 KB
1998
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