Fabrication of Condenser Microphones on Silicon on...

Advanced Materials Research 2011 / 8 Vol. 306-307

Fabrication of Condenser Microphones on Silicon on Insulator Wafer

Hishinuma, Shinsuke, Kimori, Naoki, Kumai, Yuichiro, Oku, Kouki, Takahashi, Tetsuya, Irokawa, Daiki, Sugizaki, Emiko, Watanabe, Naoki, Ikehara, Tsuyoshi, Maeda, Ryutaro, Nishioka, Yasushiro
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Volume:
306-307
Language:
english
Journal:
Advanced Materials Research
DOI:
10.4028/www.scientific.net/AMR.306-307.193
Date:
August, 2011
File:
PDF, 1.49 MB
english, 2011
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