Piezoresistivity and Electrical Conductivity of SiC Thin...

Materials Science Forum 2013 / 1 Vol. 740-742

Piezoresistivity and Electrical Conductivity of SiC Thin Films Deposited by High Temperature PECVD

Jakovlev, Oleg, Fuchs, Tino, Rohlfing, Franziska, Seidel, Helmut
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Volume:
740-742
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.740-742.657
Date:
January, 2013
File:
PDF, 408 KB
english, 2013
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