Self-Annealing Textures of Copper Damascene Interconnects
Lee, Dong Nyung, Lee, Hyo JongVolume:
467-470
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.467-470.1333
File:
PDF, 1.93 MB
english, 2004