Epitaxial GaN Layer Growth Using Nitrogen Enriched TiN Buffer Layers
Ito, Kazuhiro, Uchida, Yu, Lee, Sang-jin, Tsukimoto, Susumu, Ikemoto, Yuhei, Hirata, Koji, Shibata, Naoki, Murakami, MasanoriVolume:
916
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0916-DD04-06
Date:
January, 2006
File:
PDF, 492 KB
english, 2006