Wet Chemical Etching of Zn-containing oxides and HfO2 for...

Wet Chemical Etching of Zn-containing oxides and HfO2 for the fabrication of Transparent TFTs

Kim, Jae-Kwan, Kim, Jun Young, Han, Seung-Cheol, Kwak, Joon Seop, Lee, Ji-Myon
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Volume:
1201
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-1201-H10-25
Date:
January, 2009
File:
PDF, 1020 KB
english, 2009
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