Improvement in Junction Breakdown and GIDL using MFLA in DRAM Product
Lin, Shian-Jyh, Lai, Chao-Sung, Chen, Sheng-Tsung, Chan, Yi-Jung, Chang, Ruey-Dar, Wang, Wei Chih., Huang, Brady, Shih, Neng-Tai, Chuang, Graham, Lee, Chung-Yuan, Lee, Pei-IngVolume:
158
Year:
2011
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.3547701
File:
PDF, 4.88 MB
english, 2011