Nitrogen Bonding Configurations of SiO[sub x]N[sub y] Thin Films in Power MOSFET Gate Interfaces
Fazio, E., Monforte, F., Neri, F., Bonsignore, F., Curro, G., Camalleri, M., Cali, D.Volume:
155
Year:
2008
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.2799732
File:
PDF, 161 KB
english, 2008