Effect of Surface Reactive Site Density and Reactivity on...

Electrochemical and Solid-State Letters 2006 Vol. 9; Iss. 7

Effect of Surface Reactive Site Density and Reactivity on the Growth of Atomic Layer Deposited WN[sub x]C[sub y] Films

Hoyas, A. Martin, Whelan, C. M., Schuhmacher, J., Celis, J. P., Maex, K.
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Volume:
9
Year:
2006
Language:
english
Journal:
Electrochemical and Solid-State Letters
DOI:
10.1149/1.2203239
File:
PDF, 212 KB
english, 2006
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