Activation Treatment of Ion Implanted Dopants Using Hybrid...

Materials Science Forum 2006 Vol. 527-529

Activation Treatment of Ion Implanted Dopants Using Hybrid Super RTA Equipment

Kinoshita, Akimasa, Senzaki, Junji, Katou, Makoto, Harada, Shinsuke, Okamoto, Mitsuo, Nishizawa, Shinichi, Fukuda, Kenji, Morigasa, Fukuyoshi, Endou, Tomoyoshi, Isii, Takuo, Yashima, Teruyuki
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Volume:
527-529
Year:
2006
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.527-529.803
File:
PDF, 393 KB
english, 2006
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