Chemical Vapor Deposition of ZrxTi1-xO and HfxTi1-xO Thin...

MRS Proceedings 2006 / 1 Vol. 917

Chemical Vapor Deposition of ZrxTi1-xO and HfxTi1-xO Thin Films Using the Composite Anhydrous Nitrate Precursors

Shao, Qi-Yue, Li, Ai-Dong, Zhang, Wen-Qi, Wu, Di, Liu, Zhi-Guo, Ming, Nai-Ben
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Volume:
917
Language:
english
Journal:
MRS Proceedings
DOI:
10.1557/PROC-0917-E05-13
Date:
January, 2006
File:
PDF, 151 KB
english, 2006
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