X-Ray Imaging and TEM Study of Micropipes Related to their Propagation through Porous SiC Layer/SiC Epilayer Interface
Argunova, T.S., Gutkin, Mikhail Yu., Je, Jung Ho, Sorokin, L.M., Mosina, G.N., Savkina, N.S., Shuman, V.B., Lebedev, A.A.Volume:
457-460
Year:
2004
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.457-460.363
File:
PDF, 328 KB
english, 2004