UV sensing using film bulk acoustic resonators based on...

Scientific Reports 2015 / 3 Vol. 5

UV sensing using film bulk acoustic resonators based on Au/n-ZnO/piezoelectric-ZnO/Al structure

Bian, Xiaolei, Jin, Hao, Wang, Xiaozhi, Dong, Shurong, Chen, Guohao, Luo, J. K., Deen, M. Jamal, Qi, Bensheng
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Volume:
5
Language:
english
Journal:
Scientific Reports
DOI:
10.1038/srep09123
Date:
March, 2015
File:
PDF, 1.03 MB
english, 2015
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