Nanometric resolution in glow discharge optical emission spectroscopy and Rutherford backscattering spectrometry depth profiling of metal (Cr, Al) nitride multilayers
R. Escobar Galindo, R. Gago, E. Forniés, A. Muñoz-Martín, A. Climent Font, J.M. AlbellaVolume:
61
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.sab.2006.03.012
File:
PDF, 908 KB
english, 2006