Nanometric resolution in glow discharge optical emission...

Nanometric resolution in glow discharge optical emission spectroscopy and Rutherford backscattering spectrometry depth profiling of metal (Cr, Al) nitride multilayers

R. Escobar Galindo, R. Gago, E. Forniés, A. Muñoz-Martín, A. Climent Font, J.M. Albella
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Volume:
61
Year:
2006
Language:
english
Pages:
9
DOI:
10.1016/j.sab.2006.03.012
File:
PDF, 908 KB
english, 2006
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