Mechanical Proprieties and Residual Stress Evaluation on Heteroepitaxial 3C-SiC/Si for MEMS Application
Anzalone, Ruggero, D'Arrigo, Giuseppe, Camarda, Massimo, Piluso, Nicolo, Severino, Andrea, La Via, FrancescoVolume:
711
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.711.51
Date:
January, 2012
File:
PDF, 495 KB
english, 2012