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Stress Evaluation on Hetero-Epitaxial 3C-SiC Film on (100) Si Substrates
Anzalone, Ruggero, Camarda, M., Locke, C., Carballo, J., Piluso, N., D'Arrigo, G., Severino, A., Volinsky, A.A., Saddow, S.E., La Via, F.Volume:
717-720
Language:
english
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.717-720.521
Date:
May, 2012
File:
PDF, 683 KB
english, 2012