Stress analysis in tungsten and Si3N4 coated silicon wafers

Stress analysis in tungsten and Si3N4 coated silicon wafers

Robert E. Ogilvie, Jeffrey Nicolich
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Volume:
64
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.sab.2009.05.014
File:
PDF, 349 KB
english, 2009
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