Damage Evolution in Al-implanted 4H SiC
Hallén, Anders, Persson, P.O.Å., Kuznetsov, Andrej Yu., Hultman, L., Svensson, Bengt G.Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.869
File:
PDF, 395 KB
2000