Damage Evolution in Al-implanted 4H SiC

Damage Evolution in Al-implanted 4H SiC

Hallén, Anders, Persson, P.O.Å., Kuznetsov, Andrej Yu., Hultman, L., Svensson, Bengt G.
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Volume:
338-342
Year:
2000
Journal:
Materials Science Forum
DOI:
10.4028/www.scientific.net/MSF.338-342.869
File:
PDF, 395 KB
2000
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