[IEEE 2014 10th International Conference on Advanced Semiconductor Devices & Microsystems (ASDAM) - Smolenice, Slovakia (2014.10.20-2014.10.22)] The Tenth International Conference on Advanced Semiconductor Devices and Microsystems - Using of laser ablation technique in the processing technology of GaN/SiC based MEMS for extreme conditions
Zehetner, J., Vanko, G., Choleva, P., Dzuba, J., Ryger, I., Lalinsky, T.Year:
2014
Language:
english
DOI:
10.1109/asdam.2014.6998693
File:
PDF, 369 KB
english, 2014