Channeled Implants in 6H Silicon Carbide

Janson, Martin S., Hallén, Anders, Godignon, Phillippe, Kuznetsov, Andrej Yu., Linnarsson, Margareta K., Morvan, Erwan, Svensson, Bengt G.

How much do you like this book?

What’s the quality of the file?

Download the book for quality assessment

What’s the quality of the downloaded files?

Volume:

338-342

Year:

2000

Language:

english

Journal:

Materials Science Forum

DOI:

10.4028/www.scientific.net/MSF.338-342.889

File:

PDF, 380 KB

english, 2000

Conversion to is in progress

Conversion to is failed